
Panel Discussion during SPIE 2025
February 24, 2025 | 7:00 PM – 8:45 PM
You are invited to join us for a reception and panel discussion featuring leading technologists from IBM, imec, Intel, Samsung and Applied Materials.
Panel Title: eBeam in the Angstrom Era: Expanding the Process Control Playbook
Starts in
Day(s)
:
Hour(s)
:
Minute(s)
:
Second(s)
Description
As the AI era drives exploding demand for advanced logic and memory technologies, the chipmaking roadmap is growing more complex: Critical dimensions continue to shrink, devices adopt new 3D architectures, EUV lithography layers increase, and the industry prepares for the transition to High-NA EUV. Each of these inflections opens the door to a growing number of defects that can dramatically impact chip performance and yield. Electron beam (eBeam) imaging has long been an important tool for examining defects that are too small to be seen with optical techniques. Its ultra-high resolution enables detection of the tiniest imperfections in a sea of billions of nanoscale circuit patterns. eBeam has a critical role to play in the emerging “angstrom era” of chipmaking – from identifying defects buried deep in 3D structures, to ensuring that the intricate EUV circuit patterns are placed correctly across a multitude of process steps and layers.
In conjunction with the 2025 SPIE Advanced Lithography and Patterning conference, Applied Materials – the industry leader in eBeam – will bring together a panel of experts from across the semiconductor ecosystem to explore how chipmakers can employ this cutting-edge technology to continue pushing chip scaling to its limits. The discussion will explore novel eBeam technologies that deliver better and faster imaging, emerging use cases for eBeam in both process development and high-volume manufacturing, and the role of eBeam in new areas such as high-bandwidth memory and advanced packaging.
Please join us for a lively and engaging program!
Monday, February 24
7:00 PM – 7:45 PM
Check In and Reception
7:45 PM – 8:45 PM
Panel Discussion
San Jose Marriott Hotel
Grand Ballroom on 2nd Floor
301 S Market St,
San Jose, CA 95113